The GRM4201 is a high-capacity 4200 m³/h dry vacuum pump achieving exceptional vacuum levels with wide working pressure range and superior dust handling. With dual-end bearing support, water-cooled fully sealed motor, and smart PLC one-button control, it is ideal for HJT cell manufacturing, lithium battery production, and semiconductor Load-Lock rapid evacuation.
| Parameter | Specification |
|---|---|
| Pumping Speed | 4200 m³/h |
| Ultimate Pressure | ≤0.5 Pa |
| Rated Power | 13+10 kW |
| Voltage | 380V Three-Phase |
| Cooling Water Pressure | 0.2-0.5 MPa |
| Cooling Water Flow | 8-10 L/min |
| Cooling Water Temperature | 5-25 °C |
| Cooling Water Connection | G3/8 |
| N2 Purge Pressure | 0.1-0.7 MPa |
| N2 Purge Flow | 0-120 L/min |
| N2 Purge Connection | G1/4 |
| Inlet Connection | ISO160 |
| Outlet Connection | KF50 |
| Noise Level | ≤75 dB(A) |
| Operating Environment | 5~40°C; ≤80% RH |
| Weight | 269 kg |
| Dimensions (L*W*H) | 1695*600*1450 mm |
Load-Lock, Transfer, Metrology, Lithography
PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch
HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD