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SUZHOU KACO VACUUM EQUIPMENT CO.,LTD. scorpiosyy@foxmail.com
GRM4201 Dry Vacuum Pump 4200 M³/H Oil Free PMSM Drive ISO160 KF50 For HJT Lithium Battery

GRM4201 Dry Vacuum Pump 4200 M³/H Oil Free PMSM Drive ISO160 KF50 For HJT Lithium Battery

  • Highlight

    Oil Free dry vacuum pump

    ,

    4200 m³/h dry vacuum pump

    ,

    HJT Lithium Battery dry vacuum pump

  • Pump Type
    Dry Vacuum Pump
  • Pumping Speed
    4200 M³/h
  • Ultimate Pressure
    ≤0.5 Pa
  • Motor Type
    Permanent Magnet Synchronous Motor (PMSM)
  • Rated Power
    13+10 KW
  • Voltage
    380V Three-Phase
  • Cooling Water Temperature
    5-25 °C
  • Cooling Water Flow
    8-10 L/min
  • N2 Purge Flow
    0-120 L/min
  • Inlet Connection
    ISO160
  • Outlet Connection
    KF50
  • Noise Level
    ≤75 DB(A)
  • Weight
    269 Kg
  • Dimensions (L×W×H)
    1695×600×1450 Mm
  • Control Interface
    I/O And RS485 (Modbus Protocol)
  • Sealing System
    Lip Seal + Labyrinth Seal With N2 Purge
  • Bearing Design
    Dual-End Bearing Support
  • Control Mode
    Smart PLC With One-Button Start/Stop
  • Place of Origin
    China
  • Brand Name
    GRM
  • Certification
    ISO 9001:2015, ISO 14001:2015, ISO 45001:2018, CE, ETL
  • Model Number
    GRM4201
  • Minimum Order Quantity
    1 Set
  • Price
    USD 25,000-45,000 / Set
  • Packaging Details
    Export-grade plywood case with vacuum-sealed moisture barrier and shock-proof foam insert
  • Delivery Time
    25-40 working days
  • Payment Terms
    T/T, L/C, Western Union
  • Supply Ability
    100 Sets per Month

GRM4201 Dry Vacuum Pump 4200 M³/H Oil Free PMSM Drive ISO160 KF50 For HJT Lithium Battery

GRM4201 Dry Vacuum Pump

The GRM4201 is a high-capacity 4200 m³/h dry vacuum pump achieving exceptional vacuum levels with wide working pressure range and superior dust handling. With dual-end bearing support, water-cooled fully sealed motor, and smart PLC one-button control, it is ideal for HJT cell manufacturing, lithium battery production, and semiconductor Load-Lock rapid evacuation.

Key Features

  • Water-cooled fully sealed permanent magnet synchronous motor with VFD drive maximizes torque output for demanding processes while eliminating oil leakage risk.
  • Unique rotor design manufactured on advanced equipment with excellent geometric precision, fully interchangeable for low noise and extended service life.
  • Dust and Water Vapor Tolerant — Insensitive to dust and water vapor entrained in the pumped gas stream.
  • Compact and Integrated Design — Small footprint with high system integration for easy installation in crowded fab environments.
  • Comprehensive Protection — Built-in protection functions with strong adaptive capability for varying process conditions.
  • Low Vibration and Noise — Operates at ≤75 dB(A) at ultimate pressure for a quieter workplace.
  • Advanced Sealing System — Advanced lip seal with labyrinth oil barrier provides superior sealing performance and extended service life. Combined with nitrogen gas seal purge, prevents process media contamination of the oil reservoir, achieving a completely oil-free vacuum environment.
  • Remote Control and Monitoring — Supports I/O interface and RS485 communication (Modbus protocol) for seamless integration into factory automation systems.
  • Dual-End Bearing Support Design — Provides reliable rotor support, extremely low vibration, and superior startup reliability, making it ideal for harsh process conditions.
  • Water-Cooled Fully Sealed Motor — High-efficiency PMSM with VFD drive maximizes torque output. Fully sealed motor design eliminates oil leakage risk, enhancing operational reliability and extending service life.
  • Intelligent PLC Control System — Smart programming enables one-button start/stop. Supports external I/O interface and RS485 communication (Modbus-RTU protocol) for remote control and monitoring integration.

Technical Specifications

Parameter Specification
Pumping Speed 4200 m³/h
Ultimate Pressure ≤0.5 Pa
Rated Power 13+10 kW
Voltage 380V Three-Phase
Cooling Water Pressure 0.2-0.5 MPa
Cooling Water Flow 8-10 L/min
Cooling Water Temperature 5-25 °C
Cooling Water Connection G3/8
N2 Purge Pressure 0.1-0.7 MPa
N2 Purge Flow 0-120 L/min
N2 Purge Connection G1/4
Inlet Connection ISO160
Outlet Connection KF50
Noise Level ≤75 dB(A)
Operating Environment 5~40°C; ≤80% RH
Weight 269 kg
Dimensions (L*W*H) 1695*600*1450 mm

Application Processes

Clean Processes

Load-Lock, Transfer, Metrology, Lithography

Medium Processes

PVD Process, PVD Pre-Clean, RTA, Strip/Ashing, Oxide Etch, Silicon Etch, Implant Source, Metal Etch

Harsh Processes

HDP-CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, ALD

Target Industries

  • Heterojunction (HJT) Solar Cell: PECVD process vacuum requirements.
  • Lithium Battery Industrial: Large-scale vacuum drying and electrolyte processing.
  • Semiconductor: Load-Lock rapid evacuation and process chamber roughing.
  • Vacuum Coating: Industrial PVD/CVD coating system load-lock applications.